Godyak, Valery A.: search on Z-Library

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1

Magnetic field effects on gas discharge plasmas

Sternberg, Natalia, Godyak, Valery, Hoffman, Daniel

Journal:

Physics of Plasmas

Year:

2006

Language:

english

File:

PDF, 456 KB

english, 2006

2

Electron kinetics in low-temperature plasmas

Kolobov, Vladimir, Godyak, Valery

Journal:

Physics of Plasmas

Year:

2019

Language:

english

File:

PDF, 3.61 MB

english, 2019

3

Two-dimensional cylindrical plasma for intermediate gas pressures

Sternberg, Natalia, Godyak, Valery

Journal:

Plasma Sources Science and Technology

Year:

2011

Language:

english

File:

PDF, 367 KB

english, 2011

4

On voltâampere characteristic of symmetric CCP

Journal:

Physics of Plasmas

Year:

2020

Language:

english

File:

PDF, 1.80 MB

english, 2020

5

Ferromagnetic enhanced inductive plasma sources

Journal:

Journal of Physics D Applied Physics

Year:

2013

Language:

english

File:

PDF, 4.95 MB

english, 2013

6

Effect of surface derived hydrocarbon impurities on Ar plasma properties

Fox-Lyon, Nick, Oehrlein, Gottlieb S., Godyak, Valery

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2014

Language:

english

File:

PDF, 571 KB

english, 2014

7

Response to “Comment on ‘On the consistency of the collisionless sheath model’ ” [Phys. Plasmas 10 , 3437 (2003)]

Godyak, Valery, Sternberg, Natalia

Journal:

Physics of Plasmas

Year:

2003

Language:

english

File:

PDF, 170 KB

english, 2003

8

The Bohm Plasma-Sheath Model and the Bohm Criterion Revisited

Sternberg, Natalia, Godyak, Valery

Journal:

IEEE Transactions on Plasma Science

Year:

2007

Language:

english

File:

PDF, 419 KB

english, 2007

9

[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Practical Scaling of Multi-Frequency Capacitive Discharges for Etch Applications

Hoffman, Dan, Godyak, Valery, Yang, Jang Gyoo, Shannon, Steve

Year:

2005

Language:

english

File:

PDF, 984 KB

english, 2005

10

[AIP The XXII. international conference on phenomena in ionized gases (ICPIG) - Hoboken, New Jersey (USA) (31 Jul − 4 Aug 1995)] AIP Conference Proceedings - Magnetic and electric probe diagnostics in inductive plasmas

Godyak, Valery, Piejak, Robert, Alexandrovich, Benjamin

Year:

1996

File:

PDF, 880 KB

1996

11

[AIP The XXII. international conference on phenomena in ionized gases (ICPIG) - Hoboken, New Jersey (USA) (31 Jul − 4 Aug 1995)] AIP Conference Proceedings - Magnetic and electric probe diagnostics in inductive plasmas

Godyak, Valery, Piejak, Robert, Alexandrovich, Benjamin

Year:

1996

Language:

english

File:

PDF, 880 KB

english, 1996

12

On helicon thrusters: Will they ever fly?

Journal:

Journal of Applied Physics

Year:

2020

File:

PDF, 1.32 MB

2020

13

Approximation of the bounded plasma problem by the plasma and the sheath models

Natalia Sternberg, Valery A. Godyak

Journal:

Physica D: Nonlinear Phenomena

Year:

1996

Language:

english

File:

PDF, 698 KB

english, 1996

14

Plasma phenomena in inductive discharges

Journal:

Plasma Physics and Controlled Fusion

Year:

2003

Language:

english

File:

PDF, 516 KB

english, 2003

15

Response to “Comment on ‘Magnetic field effects on gas discharge plasmas’ ” [Phys. Plasmas 13, 063511 (2006)]

Godyak, Valery, Sternberg, Natalia, Hoffman, Daniel

Journal:

Physics of Plasmas

Year:

2007

Language:

english

File:

PDF, 43 KB

english, 2007

16

Dynamic model of the electrode sheaths in symmetrically driven rf discharges

Godyak, Valery A., Sternberg, Natalia

Journal:

Physical Review A

Year:

1990

Language:

english

File:

PDF, 882 KB

english, 1990

17

Experiments Designed to Study the Non-Linear Transition of High-Power Microwaves through Plasmas and Gases

Krasik, Yakov, Leopold, John, Shafir, Guy, Cao, Yang, Bliokh, Yuri, Rostov, Vladislav, Godyak, Valery, Siman-Tov, Meytal, Gad, Raanan, Fisher, Amnon, Bernshtam, Vladimir, Gleizer, Svetlana, Zolotukhin

Journal:

Year:

2019

Language:

english

File:

PDF, 5.29 MB

english, 2019

18

Solving the Mathematical Model of the Electrode Sheath in Symmetrically Driven RF Discharges

Natalia Sternberg, Valery A. Godyak

Journal:

Journal of Computational Physics

Year:

1994

File:

PDF, 293 KB

1994

19

Characterization of a side-type ferrite inductively coupled plasma source for large-scale processing

Lee, Kyeonghyo, Lee, Youngkwang, Jo, Sungwon, Chung, Chin-Wook, Godyak, Valery

Journal:

Plasma Sources Science and Technology

Year:

2008

Language:

english

File:

PDF, 459 KB

english, 2008

20

Plasma density perturbation caused by probes at low gas pressure

Sternberg, Natalia, Godyak, Valery

Journal:

Physics of Plasmas

Year:

2017

Language:

english

File:

PDF, 1.24 MB

english, 2017

21

Electron beam injection from a hollow cathode plasma into a downstream reactive environment: Characterization of secondary plasma production and Si 3 N 4 and Si etching

Li, Chen, Godyak, Valery, Hofmann, Thorsten, Edinger, Klaus, Oehrlein, Gottlieb S.

Journal:

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Year:

2020

File:

PDF, 3.62 MB

2020

22

On the consistency of the collisionless sheath model

Godyak, Valery, Sternberg, Natalia

Journal:

Physics of Plasmas

Year:

2002

Language:

english

File:

PDF, 279 KB

english, 2002

23

The Development of Low Frequency, High Output Electrodeless Fluorescent Lamps

Shaffer, John W., Godyak, Valery A.

Journal:

Journal of the Illuminating Engineering Society

Year:

1999

Language:

english

File:

PDF, 726 KB

english, 1999

24

Response to “Comment on ‘On the consistency of the collisionless sheath model’ ” [Phys. Plasmas 10, 4589 (2003)]

Godyak, Valery, Sternberg, Natalia

Journal:

Physics of Plasmas

Year:

2003

Language:

english

File:

PDF, 18 KB

english, 2003

25

Response to “Comment on ‘On the consistency of the collisionless sheath model’ ” [Phys. Plasmas 10, 1528 (2003)]

Godyak, Valery, Sternberg, Natalia

Journal:

Physics of Plasmas

Year:

2003

Language:

english

File:

PDF, 321 KB

english, 2003

26

Plasma stratification in radio-frequency discharges of argon gas

Kolobov, Vladimir, Arslanbekov, R R, Levko, Dmitry, Godyak, Valery

Journal:

Journal of Physics D Applied Physics

Year:

2020

File:

PDF, 561 KB

2020

27

Two-dimensional cylindrical plasma at low gas pressure

Godyak, Valery, Sternberg, Natalia

Journal:

Plasma Sources Science and Technology

Year:

2008

Language:

english

File:

PDF, 216 KB

english, 2008

28

Preface to Special Topic: Electron kinetic effects in low temperature plasmas

Kaganovich, Igor D., Godyak, Valery, Kolobov, Vladimir I.

Journal:

Physics of Plasmas

Year:

2013

Language:

english

File:

PDF, 771 KB

english, 2013

29

Response to “Comment on ‘Magnetic field effects on gas discharge plasmas’ ” [Phys. Plasmas 13, 063511 (2006)]

Sternberg, Natalia, Godyak, Valery, Hoffman, Daniel

Journal:

Physics of Plasmas

Year:

2007

Language:

english

File:

PDF, 38 KB

english, 2007

30

Effect of Collisionless Heating on Electron Energy Distribution in an Inductively Coupled Plasma

Godyak, Valery A., Kolobov, Vladimir I.

Journal:

Physical Review Letters

Year:

1998

Language:

english

File:

PDF, 218 KB

english, 1998

31

Response to “Comment on ‘On the consistency of the collisionless sheath model’ ” [Phys. Plasmas 10, 4584 (2003)]

Godyak, Valery, Sternberg, Natalia

Journal:

Physics of Plasmas

Year:

2003

Language:

english

File:

PDF, 38 KB

english, 2003

32

Experiments Designed to Study the Non-Linear Transition of High-Power Microwaves through Plasmas and Gases

Krasik, Yakov, Leopold, John, Shafir, Guy, Cao, Yang, Bliokh, Yuri, Rostov, Vladislav, Godyak, Valery, Siman-Tov, Meytal, Gad, Raanan, Fisher, Amnon, Bernshtam, Vladimir, Gleizer, Svetlana, Zolotukhin

Journal:

Year:

2019

File:

PDF, 5.29 MB

2019

33

Inductively coupled plasmas at low driving frequencies

Kolobov, Vladimir, Godyak, Valery

Journal:

Plasma Sources Science and Technology

Year:

2017

Language:

english

File:

PDF, 1.23 MB

english, 2017

34

Etching of Si 3 N 4 induced by electron beam plasma from hollow cathode plasma in a downstream reactive environment

Li, Chen, Hofmann, Thorsten, Edinger, Klaus, Godyak, Valery, Oehrlein, Gottlieb S.

Journal:

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Year:

2020

File:

PDF, 3.02 MB

2020

35

Hot plasma effects in gas discharge plasma

Journal:

Physics of Plasmas

Year:

2005

Language:

english

File:

PDF, 407 KB

english, 2005

36

Distributed Ferromagnetic Inductively Coupled Plasma as an Alternative Plasma Processing Tool

Godyak, Valery, Chung, Chin-Wook

Journal:

Japanese Journal of Applied Physics

Year:

2006

Language:

english

File:

PDF, 283 KB

english, 2006

37

Comments on plasma diagnostics with microwave probes

Journal:

Physics of Plasmas

Year:

2017

Language:

english

File:

PDF, 257 KB

english, 2017

38

[IEEE IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Monterey, CA, USA (2005.06.20-2005.06.23)] IEEE Conference Record - Abstracts. 2005 IEEE International Conference on Plasma Science - Effect of Magnetic Field on Plasma Density Distribution

Godyak, Valery, Sternberg, Natalia, Hoffman, Daniel

Year:

2005

Language:

english

File:

PDF, 763 KB

english, 2005

39

Response to “Comment on ‘On the consistency of the collisionless sheath model’ ” [Phys. Plasmas 10 , 3432 (2003)]

Godyak, Valery, Sternberg, Natalia

Journal:

Physics of Plasmas

Year:

2003

Language:

english

File:

PDF, 32 KB

english, 2003

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